超精密三坐标测量机整机结构设计

论文编号:JX1502  论文字数:15698.页数:36 附任务书，CAD图，PPT

摘  要
 本文中，对三坐标测量仪的研究现状和精密测量的关键技术做了总结，对所设计的测量仪的总体布局、床身的选材、导轨的设计、进给方式的选择做了介绍，选用燕尾型气体静压导轨，同步齿形带和钢带传动，摩擦杆进行驱动。对移动桥和溜板进行了简单的ANSYS分析，计算了移动桥受力时最大的变形量和直线度；选用伺服电机作为动力源，并对其进行了简单的功率计算，分析了测量仪的工作环境对其精度的影响和它的应用环境；定位采用开式光栅尺，对光栅尺的选型做了比较。最后针对测量仪整机进行精度分析，查找误差源和精度的综合分析。
关键词：超精密、气静压、高精度、精密测量

Three Coordinates Measuring Instrument Ultra-precision Machine Mechanism Design
ABSTRACT
 In this paper, three coordinates measuring instrument for precision measurement, the research present situation and the key technology of summing up, the design of measuring instrument lathe bed of the general layout, the design of the selection of materials, guide rail, into to the choice of the ways of doing introduced, choose coattails "type aerostatic guide rail, synchronous cog belt and steel belt transmission, friction lever driven. Slip board of mobile bridge and the simple ANSYS analysis method, the largest mobile bridge when stress deformation and straightness; Choose servo motor as a power source, and analyses the simple power calculation, analyzes the working environment of measuring apparatus to the precision of the influence and its application environment; The positioning of grating open grating feet, comparison of the selection of the feet. Finally, according to the measuring apparatus for precision analysis, find the error sources and precision of the comprehensive analysis.
Keywords: The ultra precision, Gas static pressure, High accuracy, Precision measurement

目 录
1  绪 论 2
1.1  课题的来源 2
1.2  课题的意义 2
1.3  精密测量的研究现状 2
1.4   精密测量的关键技术 6
2  超精密三坐标测量仪整机机构介绍 8
2.1  总体布局 8
2.2  床身材料选用 9
2.3  导轨的设计 10
2.4  进给传动方式的选择 14
2.5  测量仪整体结构设计 16
2.6  测量仪的工作原理 17
3  测量仪的主要零部件的设计 18
3.1  移动桥的设计 18
3.2  溜板的设计 19
3.3  电机选型 21
3.4  环境控制平台 25
3.5  光栅尺的选型 26
4  测量仪精度分析 27
4.1  测量仪误差源 27
4.2  测量仪精度分析 29
5  结束语 32
参考文献 33
致  谢 34